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Microfabrication

The CFC facility also has a clean room equipped with thin-film material deposition equipment, like the following:

 

 

 

Molecular Beam Epitaxy Deposition System

Molecular Beam Epitaxy Deposition System

 

Magnetron Sputtering System

 

 

 

Magnetron Sputtering System

 

 

 

 

Spin Coater

Spin Coater

 

Wire Bonding

 

 

 

Wire Bonding

 

 

 

 

Mask Aligner

Mask Aligner

 

Non-Reactive ion Etcher

 

 

 

Non-Reactive Ion Etcher

 

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